The Department of Defense is requesting quotations for an Atomic Layer Deposition (ALD) reactor capable of precise film deposition using thermal and plasma enhanced modes. This acquisition is designated as a Small Business Set Aside and is a Request for Quotation (RFQ). [2][1]
Key points
Requires ALD reactor for oxide, nitride, and metal film deposition. [1]
N00173-26-Q-TB02+FOR+ALD+SYSTEM+-+Posted+01+Sept+2026.pdfINVOICE 2in1 (B) For services that do not require shipment of a deliverable, submit either the Invoice 2in1, which meets the requirements for the invoice and receiving report, or the applicable invoice and receiving report, as specified by the Contracting Officer.
Generated from the public notice and source-backed solicitation passages. Confirm important requirements in the cited brief and official documents.
Public-source intelligence
Source-backed opportunity brief
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Governmentwide exclusion and removal orders (1) Contractors are prohibited from providing or using as part of the performance of the contract any covered article, or any products or services produced or provided by a source, if the covered article or the source is prohibited by any applicable FASCSA orders identified by the checkbox(es) in this paragraph (e)(1). [ :] Contracting Officer must select either "yes" or "no" for each of the following types of FASCSA orders Yes No DHS FASCSA Order Yes No DoD FASCSA Order Yes No DNI FASCSA Order DFARS Clauses Incorporated by Full Text N0017326QTB01 Page 11 of 24 252.204-7021 Contractor Compliance with the Cybersecurity Maturity Model Certification Level Requirements. (Nov 2025) CONTRACTOR COMPLIANCE WITH THE CYBERSECURITY MATURITY MODEL CERTIFICATION LEVEL REQUIREMENTS (NOV 2025) (a) .
The Contractor shall- Subcontracts (1) Insert the substance of this clause, including this paragraph (f) and excluding paragraph (e)(1), in subcontracts and other contractual instruments, including those for the acquisition of commercial products or commercial services, excluding commercially available off-the-shelf items, if the subcontract or other contractual instrument will contain a requirement to process, store, or transmit FCI or CUI; and (2) Prior to awarding a subcontract or other contractual instrument, ensure that the subcontractor has a current CMMC certificate or current CMMC status at the CMMC level that is appropriate for the information that is being flowed down to the subcontractor based on the requirements at 32 CFR 170.23.
INVOICE 2in1 (B) For services that do not require shipment of a deliverable, submit either the Invoice 2in1, which meets the requirements for the invoice and receiving report, or the applicable invoice and receiving report, as specified by the Contracting Officer.
15.403-4; and (2) Paragraph (d) of this provision for subcontracts exceeding the simplified acquisition threshold defined in FAR part 2. (End of provision) N0017326QTB01 Page 22 of 24 Section M - Evaluation Factors for Award FAR Clauses Incorporated by Full Text 52.212-2 Evaluation-Commercial Products and Commercial Services. (Deviation) (Feb 2026) Evaluation-Commercial Products and Commercial Services (Feb 2026) (Deviation) (a) Evaluation factors.
Offeror or prospective subcontractor in its business operations. (3) If the Offeror redacts data that identifies the customer (see DFARS 234.7002(e)(2)), then the Offeror shall include, for each sale, the following signed statement with the data submitted: N0017326QTB01 Page 21 of 24 "By submission of this data, the Offeror certifies that the customer was [Offeror insert company name] ____ [Offeror insert one or more of ____ the following as applicable: a government customer (e.g., Federal, state, local, or foreign government); a commercial customer purchasing the same or similar product for governmental purposes; or a commercial customer purchasing the same or similar product for a commercial, mixed, or unknown purpose]." (4) The Offeror shall provide information described as follows: [Insert description of the data and the format that are required, including . access to records necessary to permit an adequate evaluation of the proposed price in accordance with FAR 15.403-3 or DFARS 234.7002(e)] (5) Within 10 days of a written request from the Contracting Officer for additional information to support proposal analysis, the Offeror shall provide either the requested information, or a written explanation for the inability to fully comply. (6) .
Extracted from the official notice and archived solicitation files. Confirm controlling requirements in the source documents.
Notice information
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COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued. Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes. This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov. The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9. See solicitation attachment, below.
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